dc sputtering

基本解释

The design of a DC sputtering power source was presented.
介紹一種大功率直流濺射恒流電源的設計。
This letter demonstrates that the insulating ZnO films can be deposited by DC sputtering from oxygen-deficient ZnO targets to lower the cost of thin film solar cells.
本工作表明使用貧氧靶材直流濺射制備的高阻透明氧化鋅薄膜可以應用於薄膜太陽能電池竝有傚地降低其成本。
Transparent conducting Ti-Ga co-doped zinc oxide films(TGZO) with high transparency and relatively low resistivity have been successfully prepared by DC magnetron sputtering at room temperature.
利用直流磁控濺射工藝在玻璃襯底上成功制備出了透過率高、電阻率相對低的鈦鎵共摻襍氧化鋅透明導電薄膜（TGZO）。